Intevac Announces Agreement to Deliver its MATRIX PVD System for Evaluation and Qualification in Advanced Semiconductor Packaging Applications
“After over a year of development and culminating in successful customer demonstrations, we are very pleased to announce that our MATRIX PVD system has passed the stringent selection criteria at a leading OSAT manufacturer,” commented
The MATRIX PVD system for Advanced Packaging is configured for metal deposition utilizing Intevac’s patented Linear Scanning Magnet Array (LSMA™) magnetron, which achieves significantly higher target utilizations compared to static planar magnetrons. Additionally, the system can be configured with a proprietary pre-clean module, employing a gridded ion source that produces a net electrically neutral beam of well-controlled energetic Argon ions for substrate preparation.
About INTEVAC MATRIX®
INTEVAC MATRIX® leverages
In our Thin-film Equipment business, we are a leader in the design and development of high-productivity, thin-film processing systems. Our production-proven platforms are designed for high-volume manufacturing of substrates with precise thin film properties, such as the hard drive media, display cover panel, and solar photovoltaic markets we serve currently.
In our Photonics business, we are a recognized leading developer of advanced high-sensitivity digital sensors, cameras and systems that primarily serve the defense industry. We are the provider of integrated digital imaging systems for most U.S. military night vision programs.
For more information, call 408-986-9888 or visit the company's website at www.intevac.com.
INTEVAC MATRIX® and LSMA™ are trademarks of
This press release includes statements that constitute “forward-looking statements” within the meaning of the Private Securities Litigation Reform Act of 1995 (the “Reform Act”).
Chief Financial Officer